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Cross section of 4-point bearing

Bearing Kits for RTP tools with HP™ Robot

Fala RTP Blade housingRapid thermal processing 200 mm tools can be rough on bearings. Fala ceramic hybrid shielded bearings with PFPE-PTFE grease give excellent performance under RTP, EPI and Gigafill™ Centura conditions.

Fala bearings work with existing OEM hub and elbow joints. For optimal performance, we recommend Fala reusable pivots and blade housings.

Inside of RTP housing

Bearings are an important source of contamination and downtime. Fala combines shielding, 4-point, full complement, and high precision to yield a 70% reduction in contamination and a 4X improvement in bearing life.

Superior Fala housings feature full body pivots and a reverse assembly design that simplifies blade maintenance and eliminates torque requirements.

HP™ RTP Product Offering

Name PN Description
HP™ RTP Buffer H22540 Hub, wrist, and elbow bearings for HP™ robot with new high precision buffer blade housing for quartz blade
HP™ Refill H22570 Hub, wrist, and elbow bearings for HP™ robot already fitted Fala housing
HP™ RTP housing A2009 Blade housing assembly for HP™ RTP robot
HP™ EPI housing A2009T Blade housing assembly for HP™ Centura robot (over 550 °C)
Bearings, pivots, and housings available separately.

 

200 mm Summary Table

Many configurations exist depending on the applications

Consult our 200 mm reference table for cross-reference information.  

Unmatched Performance

  • Longer Life
    Fala Technologies can last 4 times as long as other bearings, resulting in significantly lower cost of ownership.
  • No Unscheduled Maintenance
    High precision Fala bearings eliminate unscheduled maintenance events.
  • Cleaner
    Grease containment as well as precise construction keep particles at the very lowest level.